| 规格和标准 |
Gas target: phosphine, arsine, silane, diborane, Germane, hydrogen selenide (For other information, please refer to the list of gas types for semiconductor material gases and gas to be detected) Depth (mm): 39 Height (mm): 200 Width (mm): 43 Detection principle: Heat-line semiconductor type Alarm type: Gas alarm: Issued when the detected gas concentration reaches or exceeds the alarm set value Fault alarm: Sensor connection/disconnection, battery drop, flow rate drop, circuit error, calibration range error, clock error, pump error Gas alarm: lamp flashing, buzzer intermittent fault warning: lamp flashing, buzzer intermittent fault display Alarm setting value: Measured gas detection method: pump suction type LCD display: gas name, gas concentration (scale + bar display), time, remaining battery level, suction, operation, mode Power supply: 2 AA alkaline batteries Continuous time: Approximately 12 hours (room temperature, no alarm, no lighting) Dustproof and water-resistant structure: IP55 equivalent Function: LCD backlight (automatically lit at alarm), data logger, log data display, peak hold, clock display, gas重读
|